| GFAB Ref |
Category |
OEM |
Model |
Tool/Description |
Qty |
Wafer size |
| GFab003620 |
CMP |
Applied Materials |
Mirra Messa |
Wsix |
1 |
200 |
| GFab003647 |
CMP |
Applied Materials |
Mirra Messa |
Container |
1 |
200 |
| GFab003593 |
CMP |
Applied Materials |
MIRRA |
CHEMICAL MECHANICAL PLANALIZAR |
1 |
200 |
| GFab003600 |
CMP |
Applied Materials |
MIRRA |
CHEMICAL MECHANICAL PLANALIZAR |
1 |
200 |
| GFab003602 |
CMP |
Applied Materials |
MIRRA |
CHEMICAL MECHANICAL PLANALIZAR |
1 |
200 |
| GFab003609 |
CMP |
Applied Materials |
MIRRA |
CHEMICAL MECHANICAL PLANALIZAR |
1 |
200 |
| GFab003610 |
CMP |
Applied Materials |
MIRRA |
CHEMICAL MECHANICAL PLANALIZAR |
1 |
200 |
| GFab003616 |
CMP |
Applied Materials |
MIRRA |
CHEMICAL MECHANICAL PLANALIZAR |
1 |
200 |
| GFab003618 |
CMP |
Applied Materials |
MIRRA |
CHEMICAL MECHANICAL PLANALIZAR |
1 |
200 |
| GFab003636 |
CMP |
Applied Materials |
MIRRA |
CHEMICAL MECHANICAL PLANALIZAR |
1 |
200 |
| GFab003696 |
CMP |
Applied Materials |
P-5000 |
PO NIT DEP |
1 |
200 |
| GFab003147 |
CMP |
Applied Materials |
Compass 200 |
|
1 |
200mm |
| GFab003145 |
CMP |
Applied Materials |
Mirra 3400 |
|
1 |
200mm |
| GFab003148 |
CMP |
Applied Materials |
Mirra 3400 |
|
1 |
200mm |
| GFab003149 |
CMP |
Applied Materials |
Mirra 3400 |
|
1 |
200mm |
| GFab003150 |
CMP |
Applied Materials |
Mirra 3400 |
|
1 |
200mm |
| GFab003151 |
CMP |
Applied Materials |
Mirra 3400 |
|
1 |
200mm |
| GFab003152 |
CMP |
Applied Materials |
Mirra 3400 |
|
1 |
200mm |
| GFab003153 |
CMP |
Applied Materials |
Mirra 3400 |
|
1 |
200mm |
| GFab003154 |
CMP |
Applied Materials |
Mirra 3400 |
|
1 |
200mm |
| GFab003312 |
CMP |
Applied Materials |
REFLEXIONS |
|
1 |
200mm |
| GFab003313 |
CMP |
Applied Materials |
REFLEXIONS |
|
1 |
200mm |
| GFab003624 |
CMP |
DNS |
DNSAS2000 |
POST CMP SCRUBBER |
1 |
200 |
| GFab003625 |
CMP |
DNS |
DNSAS2000 |
POST CMP SCRUBBER |
1 |
200 |
| GFab003632 |
CMP |
DNS |
DNSAS2000 |
POST CMP SCRUBBER |
1 |
200 |
| GFab003633 |
CMP |
DNS |
DNSAS2000 |
POST CMP SCRUBBER |
1 |
200 |
| GFab003707 |
CMP |
IPEC/Speedfam/Novellus |
372M |
ILD CMP |
2 |
200 |
| GFab003457 |
CMP |
IPEC-SPEEDFAM |
AVANTGAARD 776 OXCMP |
Oxide |
1 |
|
| GFab003458 |
CMP |
IPEC-SPEEDFAM |
MOMENTUM OXCMP |
Oxide |
1 |
|
| GFab003287 |
CMP |
Lam Research |
200 SERIES 2 |
|
1 |
200mm |
| GFab003288 |
CMP |
Lam Research |
200 SERIES 2 |
|
1 |
200mm |
| GFab003355 |
CMP |
Lam Research |
200 SERIES 2 |
|
1 |
200mm |
| GFab003354 |
CMP |
Lam Research / OnTrak |
200 SERIES 0 |
|
1 |
200mm |
| GFab003594 |
CMP |
Nova |
NOVSCAN 2040 |
NOVASCAN 2040 |
1 |
200 |
| GFab003595 |
CMP |
Nova |
NOVSCAN 2040 |
NOVASCAN 2040 |
1 |
200 |
| GFab003601 |
CMP |
Nova |
NOVSCAN 2040 |
NOVASCAN 2040 |
1 |
200 |
| GFab003605 |
CMP |
Nova |
NOVSCAN 2040 |
NOVASCAN 2040 |
1 |
200 |
| GFab003612 |
CMP |
Nova |
NOVSCAN 2040 |
NOVASCAN 2040 |
1 |
200 |
| GFab003613 |
CMP |
Nova |
NOVSCAN 2040 |
NOVASCAN 2040 |
1 |
200 |
| GFab003617 |
CMP |
Nova |
NOVSCAN 2040 |
NOVASCAN 2040 |
1 |
200 |
| GFab003619 |
CMP |
Nova |
NOVSCAN 2040 |
NOVASCAN 2040 |
1 |
200 |
| GFab003293 |
CMP |
Novellus |
372M |
|
1 |
200mm |
| GFab003368 |
CMP |
Novellus |
372M |
|
1 |
200mm |
| GFab003214 |
CMP |
Speedfam |
CMP V-ILD |
|
1 |
200mm |