| GFAB Ref |
Category |
OEM |
Model |
Tool/Description |
Qty |
Wafer size |
| GFab003043 |
CVD |
AG ASSOCIATES |
2106 |
Rapid Thermal Processing System,
for 100mm-150mm Wafers |
1 |
150 |
| GFab003280 |
CVD |
Anelva |
1052 |
|
1 |
200mm |
| GFab003303 |
CVD |
Applied Materials |
P5000 |
|
1 |
200mm |
| GFab003304 |
CVD |
Applied Materials |
P5000 |
|
1 |
200mm |
| GFab003305 |
CVD |
Applied Materials |
P5000 |
|
1 |
200mm |
| GFab003306 |
CVD |
Applied Materials |
P5000 |
|
1 |
200mm |
| GFab003307 |
CVD |
Applied Materials |
P5000 |
|
1 |
200mm |
| GFab003308 |
CVD |
Applied Materials |
P5000 |
|
1 |
200mm |
| GFab003705 |
CVD |
Applied Materials |
5200 Centura DPS |
2 CH DPS, 2 CH ASP+, VHP+ Robot |
1 |
200 |
| GFab003309 |
CVD |
Applied Materials |
5200 ULTIMA |
|
1 |
200mm |
| GFab003310 |
CVD |
Applied Materials |
5200 ULTIMA |
|
1 |
200mm |
| GFab003554 |
CVD |
Applied Materials |
CENTURA E5200 |
GATEOX 2 DPN / RTP |
1 |
200 |
| GFab003569 |
CVD |
Applied Materials |
CENTURA E5200 |
EPI SI DEP |
1 |
200 |
| GFab003575 |
CVD |
Applied Materials |
CENTURA E5200 |
EPI SI DEP |
1 |
200 |
| GFab003683 |
CVD |
Applied Materials |
CENTURA E5200 |
ILD Dep |
1 |
200 |
| GFab003582 |
CVD |
Applied Materials |
ENDURA 5500 |
MMTi Dep |
1 |
200 |
| GFab003639 |
CVD |
Applied Materials |
PRODUCER |
BPSG |
1 |
200 |
| GFab003657 |
CVD |
Applied Materials |
PRODUCER |
DARC Dep |
1 |
200 |
| GFab003661 |
CVD |
Applied Materials |
PRODUCER |
BPSG |
1 |
200 |
| GFab003640 |
CVD |
Applied Materials |
PRODUCER |
TC/DARC DEP |
1 |
200 |
| GFab003592 |
CVD |
Applied Materials |
C-5200 |
TUNGSTEN DEP |
1 |
200 |
| GFab003635 |
CVD |
Applied Materials |
C-5200 |
CDV TI DEP |
1 |
200 |
| GFab003642 |
CVD |
Applied Materials |
C-5200 |
TUNGSTEN DEP |
1 |
200 |
| GFab003688 |
CVD |
Applied Materials |
C-5200 |
ILD DEP |
1 |
200 |
| GFab003598 |
CVD |
Applied Materials |
CENTURA RTP |
RTP |
1 |
200 |
| GFab003652 |
CVD |
Applied Materials |
E5500 |
METAL DEP |
1 |
200 |
| GFab003680 |
CVD |
Applied Materials |
E5500 |
METAL DEP |
1 |
200 |
| GFab003691 |
CVD |
Applied Materials |
E5500 |
METAL DEP |
1 |
200 |
| GFab003631 |
CVD |
Applied Materials |
ENDURA CL |
METAL DEP |
1 |
200 |
| GFab003694 |
CVD |
Applied Materials |
P-5000 |
PO NIT DEP |
1 |
200 |
| GFab003157 |
CVD |
Applied Materials |
Centura 5200 |
2CH RTP Xe, Narrow Body L/Ls,
HP+ Robot |
1 |
200mm |
| GFab003167 |
CVD |
Applied Materials |
Centura 5200 |
2 Chamber RTP Mod 1 type |
1 |
|
| GFab003172 |
CVD |
Applied Materials |
Centura 5200 |
RTP 1 CH XePLUS Toxic RP, 1 CH
DCSxZ, TCCP Mainframe |
1 |
150mm |
| GFab003533 |
CVD |
Applied Materials |
P5000 |
4 Chamber Nitride |
1 |
200 |
| GFab003534 |
CVD |
Applied Materials |
P5000 |
2 Chamber SACVD, 2 Chamber Etch,
Phase IV Hotbox, w/ pumps |
1 |
200 |
| GFab003540 |
CVD |
Applied Materials |
P5000 |
Refurbished to your specs, TxZ,
DxZ, WxZ, etc. |
1 |
100/200 |
| GFab003171 |
CVD |
Applied Materials |
P-5000 |
2ea. ILC Chambers & 1ea.
BPSG chamber |
1 |
200mm |
| GFab003144 |
CVD |
Applied Materials |
Producer |
|
1 |
200mm |
| GFab003314 |
CVD |
Applied Materials |
ULTIMA X 300MM |
|
1 |
200mm |
| GFab003315 |
CVD |
Applied Materials |
ULTIMA X 300MM |
|
1 |
200mm |
| GFab003437 |
CVD |
APPLIED MATERIALS |
CENTURA EPI |
Epi |
1 |
|
| GFab003281 |
CVD |
ASM |
EPSILON E3000 |
|
1 |
200mm |
| GFab003317 |
CVD |
ASM |
EPSILON E3000 |
|
1 |
200mm |
| GFab003175 |
CVD |
ASM |
Polygon 8200 |
dual chamber cluster tool |
1 |
300mm |
| GFab003302 |
CVD |
BioRad / Accent |
QS3300 |
|
1 |
200mm |
| GFab003674 |
CVD |
DNS |
DNS SSW 80A |
SCRUBBER |
1 |
200 |
| GFab003544 |
CVD |
DNS |
DNS SSW 80A-AR |
SCRUBBER |
1 |
200 |
| GFab003656 |
CVD |
DNS |
DNSSSW 80A |
SCRUBBER |
1 |
200 |
| GFab003665 |
CVD |
DNS |
DNSSSW 80A |
SCRUBBER |
1 |
200 |
| GFab003350 |
CVD |
Kokusai |
CX9620 |
|
1 |
200mm |
| GFab003351 |
CVD |
Kokusai |
CX9620 |
|
1 |
200mm |
| GFab003352 |
CVD |
Kokusai |
VERTRON III |
|
1 |
200mm |
| GFab003286 |
CVD |
Kokusai |
VERTRON III |
|
1 |
200mm |
| GFab003353 |
CVD |
Kokusai |
VERTRON III |
|
1 |
200mm |
| GFab003271 |
CVD |
Kokusai |
VERTRON V |
|
1 |
200mm |
| GFab003086 |
CVD |
MRL INDUSTRIES |
1024 |
3-Tube Horizontal Diffusion
Furnace w/Cantilever Loaders, 150mm Wafers |
1 |
|
| GFab003087 |
CVD |
MRL INDUSTRIES |
14TC-45 |
SMD IR Conveyor Furnace, 5
Zones, 9" Long Clamshell Chamber Design, MPU Controlled |
1 |
|
| GFab003539 |
CVD |
Novellus |
C1-150 Concept One |
Refurb to your specs. PECVD
(Nitride/Oxide), Tungsten, one arm robot, Cool Station, Sigma 6 Vers Iv TEOS,
Dual Freq RF, ELO Touch Screen |
1 |
150/200 |
| GFab003201 |
CVD |
Novellus |
C2 Altus |
|
1 |
200mm |
| GFab003203 |
CVD |
Novellus |
C2 Dual Sequel-SS |
|
1 |
200mm |
| GFab003542 |
CVD |
Novellus |
C2 Sequel/Speed |
|
1 |
150/200 |
| GFab003204 |
CVD |
Novellus |
C2 Single Sequel non-shrink |
|
1 |
200mm |
| GFab003202 |
CVD |
Novellus |
C2 Single Speed shrink |
|
1 |
200mm |
| GFab003100 |
CVD |
NOVELLUS |
Concept 1 |
Dielectric CVD Tool for 200mm Wafers |
1 |
200 |
| GFab003101 |
CVD |
NOVELLUS |
Concept 1 |
Tungsten CVD Tool for 200mm
Wafers |
1 |
200 |
| GFab003295 |
CVD |
Novellus |
CONCEPT 2 |
|
1 |
200mm |
| GFab003369 |
CVD |
Novellus |
CONCEPT 2 |
|
1 |
200mm |
| GFab003537 |
CVD |
Novellus |
Concept Two C2 Dual altus |
Refurbished to your specs |
1 |
150/200 |
| GFab003538 |
CVD |
Novellus |
Concept Two C2 Dual Sequel |
Refurbished to your specs |
1 |
150/200 |
| GFab003536 |
CVD |
Novellus |
Concept Two C2 SEQUEL |
Refurbished to your specs |
1 |
150/200 |
| GFab003535 |
CVD |
Novellus |
Concept Two, C2 Altus |
Refurbished to your specs |
1 |
150/200 |
| GFab003200 |
CVD |
Novellus |
Prism |
|
1 |
200mm |
| GFab003370 |
CVD |
Novellus |
SEQUEL |
|
1 |
200mm |
| GFab003521 |
CVD |
Novellus |
Vector |
ULK CVD |
1 |
300 |
| GFab003522 |
CVD |
Novellus |
Vector |
UV Cure |
1 |
300 |
| GFab003493 |
CVD |
NOVELLUS |
C1-150 |
PECVD |
1 |
|
| GFab003494 |
CVD |
NOVELLUS |
C2 DUAL ALTUS |
MCVD |
1 |
|
| GFab003495 |
CVD |
NOVELLUS |
C2 DUAL ALTUS |
MCVD |
1 |
|
| GFab003496 |
CVD |
NOVELLUS |
C2 SEQUEL |
PECVD |
1 |
|
| GFab003497 |
CVD |
NOVELLUS |
C2 TRIPLE SPEED |
HDP |
1 |
|
| GFab003526 |
CVD |
Poonsang |
|
Very High Pressure Oxidation |
1 |
200/300 |
| GFab003373 |
CVD |
Rudolph Technologies |
FE3 |
|
1 |
200mm |
| GFab003530 |
CVD |
SCP Global Technologies |
9200 |
Low K Development |
1 |
200 |
| GFab003123 |
CVD |
STS |
Multiplex |
CVD Deposition for 100mm-200mm
Wafers |
1 |
200 |
| GFab003040 |
CVD |
TEL |
Alpha-8SE |
Vertical HTO Furnace |
1 |
|
| GFab003125 |
CVD |
TEL |
Alpha-8SE |
Vertical HTO Furnace |
1 |
|
| GFab003126 |
CVD |
TEL |
Alpha-8SE-E |
Small Footprint Oxidation
Furnace for up to 200mm Wafers |
1 |
200 |
| GFab003127 |
CVD |
TEL |
SCCM |
Chamber Only for TEL Unity M
Etch Tool - Excellent Condition |
1 |
|
| GFab003128 |
CVD |
TEMESCAL |
FC-1800 |
E-Beam Evaporator, with CV-14
P/S, 4 Pocket E-Gun, Substrate Heat, more |
1 |
|
| GFab003129 |
CVD |
TEMESCAL |
FCE-4000 |
E-Beam Evaporator, with 3' X 3'
X 3' Chamber, CV-14 P/S, 4 Pocket E-Gun, Ion Tech Ion Gun, PLC Controller,
Inficon IC5 Deposition Controller, Substrate Heat, MFC Gas System |
1 |
|
| GFab003382 |
CVD |
Thermawave |
2600B |
|
1 |
200mm |
| GFab003508 |
CVD |
TOKYO
ELECTRON |
ALPHA 8S |
|
1 |
|
| GFab003555 |
CVD |
TOKYO
ELECTRON |
TEL ACT 8 |
SOD COAT |
1 |
200 |
| GFab003690 |
CVD |
TOKYO
ELECTRON |
TEL EP UNITY |
SFD Dep |
1 |
200 |
| GFab003591 |
CVD |
TOKYO
ELECTRON |
TELALPHA 801 |
OXIDE FURNACE |
1 |
200 |
| GFab003543 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
PIQ CURE FURNACE |
1 |
200 |
| GFab003545 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
NITRIDE FURNACE |
1 |
200 |
| GFab003546 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
NITRIDE FURNACE |
1 |
200 |
| GFab003547 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
AP furnace |
1 |
200 |
| GFab003548 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
OXIDE FURNACE |
1 |
200 |
| GFab003549 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
OXIDE FURNACE |
1 |
200 |
| GFab003553 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
POLY FURNACE |
1 |
200 |
| GFab003560 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
AP furnace |
1 |
200 |
| GFab003563 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
Nitride Furnace |
1 |
200 |
| GFab003564 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
SOD FURNACE |
1 |
200 |
| GFab003568 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
NITRIDE FURNACE |
1 |
200 |
| GFab003573 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
Aluminium oxide |
1 |
200 |
| GFab003574 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
Aluminium oxide |
1 |
200 |
| GFab003583 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
REFLOW FURNACE |
1 |
200 |
| GFab003586 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
Nitride Furnace |
1 |
200 |
| GFab003596 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
Poly Furnace |
1 |
200 |
| GFab003597 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
Poly Furnace |
1 |
200 |
| GFab003644 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
REFLOW FURNACE |
1 |
200 |
| GFab003658 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
Poly Furnace |
1 |
200 |
| GFab003659 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
Poly Furnace |
1 |
200 |
| GFab003676 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8S |
ALLOY FURNACE |
1 |
200 |
| GFab003557 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8SE
|
NITRIDE FURNACE |
1 |
200 |
| GFab003561 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8SE
|
SEL OX FURNACE |
1 |
200 |
| GFab003571 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8SE
|
Poly Furnace |
1 |
200 |
| GFab003576 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8SE
|
NITRIDE FURNACE |
1 |
200 |
| GFab003577 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8SE
|
NITRIDE FURNACE |
1 |
200 |
| GFab003588 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8SE
|
NITRIDE FURNACE |
1 |
200 |
| GFab003604 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8SE
|
HAFNIUM FURNACE |
1 |
200 |
| GFab003606 |
CVD |
TOKYO
ELECTRON |
TELALPHA 8SE
|
Aluminium oxide |
1 |
200 |
| GFab003704 |
CVD |
TOKYO
ELECTRON |
TELUNITY EP |
SFD TIN DEP |
1 |
200 |
| GFab003238 |
CVD |
Tokyo Electron (TEL) |
601 |
|
1 |
200mm |
| GFab003240 |
CVD |
Tokyo Electron (TEL) |
601D-alpha-6 |
|
1 |
200mm |
| GFab003217 |
CVD |
Tokyo Electron (TEL) |
Alpha - 8S - Nitride |
|
1 |
200mm |
| GFab003220 |
CVD |
Tokyo Electron (TEL) |
Alpha - 8S - Nitride |
|
1 |
200mm |
| GFab003249 |
CVD |
Tokyo Electron (TEL) |
Alpha - 8S - Oxide |
|
1 |
200mm |
| GFab003216 |
CVD |
Tokyo Electron (TEL) |
Alpha - 8SE |
Furnace |
1 |
200mm |
| GFab003218 |
CVD |
Tokyo Electron (TEL) |
Alpha - 8SE |
|
1 |
200mm |
| GFab003222 |
CVD |
Tokyo Electron (TEL) |
Alpha 801 |
|
1 |
200mm |
| GFab003223 |
CVD |
Tokyo Electron (TEL) |
Alpha 801 |
|
1 |
200mm |
| GFab003224 |
CVD |
Tokyo Electron (TEL) |
Alpha 801 |
|
1 |
200mm |
| GFab003225 |
CVD |
Tokyo Electron (TEL) |
Alpha 801 |
|
1 |
200mm |
| GFab003232 |
CVD |
Tokyo Electron (TEL) |
Alpha 801 |
|
1 |
200mm |
| GFab003233 |
CVD |
Tokyo Electron (TEL) |
Alpha 801 |
|
1 |
200mm |
| GFab003239 |
CVD |
Tokyo Electron (TEL) |
Alpha 858 |
|
1 |
200mm |
| GFab003231 |
CVD |
Tokyo Electron (TEL) |
Alpha 858 SiN |
|
1 |
200mm |
| GFab003221 |
CVD |
Tokyo Electron (TEL) |
Alpha 858 TEOS/Nitride |
|
1 |
200mm |
| GFab003246 |
CVD |
Tokyo Electron (TEL) |
Alpha 8S Anneal |
|
1 |
200mm |
| GFab003230 |
CVD |
Tokyo Electron (TEL) |
Alpha 8S copper alloy |
|
1 |
200mm |
| GFab003247 |
CVD |
Tokyo Electron (TEL) |
Alpha 8S LPCVD Nitride |
|
1 |
200mm |
| GFab003236 |
CVD |
Tokyo Electron (TEL) |
Alpha 8S Oxide |
|
1 |
200mm |
| GFab003248 |
CVD |
Tokyo Electron (TEL) |
Alpha 8S Poly Si LPCVD |
|
1 |
200mm |
| GFab003234 |
CVD |
Tokyo Electron (TEL) |
Alpha 8S ZABF |
|
1 |
200mm |
| GFab003235 |
CVD |
Tokyo Electron (TEL) |
Alpha 8SE doped poly |
|
1 |
200mm |
| GFab003243 |
CVD |
Tokyo Electron (TEL) |
Alpha 8SE SiN ATPF |
|
1 |
200mm |
| GFab003245 |
CVD |
Tokyo Electron (TEL) |
Alpha 8SE Ta2O5 |
|
1 |
200mm |
| GFab003244 |
CVD |
Tokyo Electron (TEL) |
Alpha 8SE TiN Furnace |
|
1 |
200mm |
| GFab003242 |
CVD |
Tokyo Electron (TEL) |
Alpha 8SE-E doped poly |
|
1 |
|
| GFab003228 |
CVD |
Tokyo Electron (TEL) |
Alpha 8SE-E-EVAFGN SiN |
|
1 |
200mm |
| GFab003219 |
CVD |
Tokyo Electron (TEL) |
Alpha-8S |
|
1 |
200mm |
| GFab003229 |
CVD |
Tokyo Electron (TEL) |
W/D Oxide |
|
1 |
200mm |
| GFab003261 |
CVD |
Watkins-Johnson / Aviza |
1500TF CVD |
|
1 |
200mm |
| GFab003710 |
CVD |
Watkins-Johnson / Aviza |
WJ1000 |
APCVD BPSG |
1 |
200 |
| GFab003708 |
CVD |
Watkins-Johnson / Aviza |
WJ1500 |
APCVD BPSG |
1 |
200 |
| GFab003541 |
CVD |
Watkins-Johnson / Aviza |
WJ999R or WJ999Teos |
BPSG, USG, PSG, CRS, UPS, O3
Gen, TEOS or Hydride |
1 |
100/200 |
| GFab003262 |
CVD |
Watkins-Johnson / Aviza |
WNJ-1500TF Model 1.0 |
|
1 |
200mm |
| GFab003717 |
CVD |
TEL A-808S |
|
Vertical Furnace |
1 |
200mm |