|
|
Etch Equipment
| GFAB Ref |
Category |
OEM |
Model |
Tool/Description |
Qty |
Wafer size |
| GFab003433 |
Etch |
ALCATEL
/ ADIXEN |
AMS 200 SE_I-SPEEDER |
Poly |
1 |
|
| GFab003637 |
Etch |
Applied Materials |
DPS2 |
ETCHER |
1 |
200 |
| GFab003651 |
Etch |
Applied Materials |
DPS2 |
ETCHER |
1 |
200 |
| GFab003672 |
Etch |
Applied Materials |
DPS |
ETCHER |
1 |
200 |
| GFab003687 |
Etch |
Applied Materials |
DPS |
ETCHER |
1 |
200 |
| GFab003603 |
Etch |
Applied Materials |
IPS |
ETCHER |
1 |
200 |
| GFab003627 |
Etch |
Applied Materials |
IPS |
ETCHER |
1 |
200 |
| GFab003566 |
Etch |
Applied Materials |
P-5000 |
ETCHER |
1 |
200 |
| GFab003584 |
Etch |
Applied Materials |
P-5000 |
ETCHER |
1 |
200 |
| GFab003611 |
Etch |
Applied Materials |
P-5000 |
ETCHER |
1 |
200 |
| GFab003697 |
Etch |
Applied Materials |
P-5000 |
ETCHER |
1 |
200 |
| GFab003168 |
Etch |
Applied Materials |
Centura 5200 |
DPS Poly, Ph II VME, Ph II
Controller, HP+ Robot, Wide Body L/Ls, Wafer Mapping, 200mm SNNF, HR-DTCU, |
1 |
200mm |
| GFab003436 |
Etch |
APPLIED
MATERIALS |
CENTURA DPS R1 METAL ETCH |
Metal |
1 |
|
| GFab003438 |
Etch |
APPLIED
MATERIALS |
CENTURA HART TRENCH ETCH |
Poly |
1 |
|
| GFab003320 |
Etch |
Axcelis |
TECH ES3 |
|
1 |
200mm |
| GFab003445 |
Etch |
AXCELIS |
FUSION 200ACU |
|
1 |
|
| GFab003446 |
Etch |
AXCELIS |
FUSION GEMINI GPS |
|
1 |
|
| GFab003324 |
Etch |
DNS |
FC-3000 |
|
1 |
200mm |
| GFab003325 |
Etch |
DNS |
FC-3000 |
|
1 |
200mm |
| GFab003058 |
Etch |
DRYTEK |
384T |
Plasma Metal Etcher, 4ea
Available |
1 |
|
| GFab003187 |
Etch |
Gasonics |
Aura 3000 |
|
1 |
200mm |
| GFab003186 |
Etch |
Gasonics |
Aura 3010 |
|
1 |
200mm |
| GFab003556 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003558 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003559 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003562 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003580 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003581 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003587 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003666 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003682 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003685 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003686 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003699 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003703 |
Etch |
GASONICS |
Gasonics ( Aura 3010) |
ASHER |
1 |
200 |
| GFab003452 |
Etch |
GASONICS |
L3510 |
|
1 |
|
| GFab003453 |
Etch |
GASONICS |
L3510 |
|
1 |
|
| GFab003328 |
Etch |
Hitachi |
HI TECH M712E |
|
1 |
200mm |
| GFab003621 |
Etch |
Hitachi |
HITACHIM511 |
ETCHER |
1 |
200 |
| GFab003622 |
Etch |
Hitachi |
HITACHIM511 |
ETCHER |
1 |
200 |
| GFab003356 |
Etch |
Lam Research |
4428 |
|
1 |
200mm |
| GFab003357 |
Etch |
Lam Research |
4428 |
|
1 |
200mm |
| GFab003358 |
Etch |
Lam Research |
4528 |
|
1 |
200mm |
| GFab003359 |
Etch |
Lam Research |
4728 |
|
1 |
200mm |
| GFab003360 |
Etch |
Lam Research |
4728 |
|
1 |
200mm |
| GFab003195 |
Etch |
LAM Research |
4400 Rainbow |
|
1 |
200mm |
| GFab003194 |
Etch |
LAM Research |
Alliance (A4) |
|
1 |
200mm |
| GFab003698 |
Etch |
Lam Research |
LAMTCP9400 |
ETCHER |
1 |
200 |
| GFab003082 |
Etch |
LAM RESEARCH |
Rainbow 4400 |
Plasma Poly/Nitride Etcher,
Clamping Chuck, Classic Software, 200mm Wafers |
1 |
|
| GFab003083 |
Etch |
LAM RESEARCH |
Rainbow 4520 |
Plasma Oxide Etcher, ESC,
Envision Software, 200mm Wafers |
1 |
200 |
| GFab003196 |
Etch |
LAM Research |
TCP 9600 |
|
1 |
200mm |
| GFab003197 |
Etch |
LAM Research |
TCP 9600SE |
|
1 |
200mm |
| GFab003084 |
Etch |
LAM RESEARCH |
TCP-9400SE |
Plasma Poly/Nitride Etcher, ESC,
Envision Software, 200mm Wafers |
1 |
|
| GFab003085 |
Etch |
LAM RESEARCH |
TCP-9600SE |
Plasma Metal Etcher, ESC,
Envision Software, Astex Microwave Generator, 150mm Wafers |
1 |
|
| GFab003480 |
Etch |
LAM
RESEARCH |
2300 POLY ETCH |
Poly |
1 |
|
| GFab003481 |
Etch |
LAM
RESEARCH |
ALLIANCE 4520 |
Oxide |
1 |
|
| GFab003667 |
Etch |
LAM
RESEARCH |
LAMEXELAN |
ETCHER |
1 |
200 |
| GFab003570 |
Etch |
LAM
RESEARCH |
LAMR4420 |
ETCHER |
1 |
200 |
| GFab003608 |
Etch |
LAM
RESEARCH |
LAMR4420 |
ETCH SYSTEM |
1 |
200 |
| GFab003550 |
Etch |
LAM
RESEARCH |
LAMTCP9400 |
ETCHER |
1 |
200 |
| GFab003482 |
Etch |
LAM
RESEARCH |
RAINBOW 4520 OXIDE |
Oxide |
1 |
|
| GFab003483 |
Etch |
LAM
RESEARCH |
RAINBOW 4520 OXIDE |
Oxide |
1 |
|
| GFab003484 |
Etch |
LAM
RESEARCH |
RAINBOW 4520 OXIDE |
Oxide |
1 |
|
| GFab003485 |
Etch |
LAM
RESEARCH |
STAND-ALONE 9600 METAL ETCH |
Metal |
1 |
|
| GFab003486 |
Etch |
LAM
RESEARCH |
STAND-ALONE 9600SE METAL ETCH |
Metal |
1 |
|
| GFab003487 |
Etch |
LAM
RESEARCH |
STAND-ALONE 9600SE METAL ETCH |
Metal |
1 |
|
| GFab003488 |
Etch |
MATTSON |
ASPEN III ICP |
Stripper/Asher |
1 |
|
| GFab003294 |
Etch |
Novellus |
AURA 2000 |
|
1 |
200mm |
| GFab003103 |
Etch |
OXFORD INSTRUMENTS |
Plasmalab µP |
Dual RIE System, Dual 12"
(i.d.) Chambers, Turbo Pumped |
1 |
|
| GFab003104 |
Etch |
PERKIN-ELMER |
2400-8J |
RF Sputtering System, 3ea 200mm
Targets, RF Etch, RF Bias |
1 |
|
| GFab003106 |
Etch |
PLASMA-THERM |
Waf'r Batch 74 |
RIE/Parallel Plasma Etcher |
1 |
|
| GFab003039 |
Etch |
SEZ |
304 |
Spin Etcher, 300mm |
1 |
300 |
| GFab003121 |
Etch |
SEZ |
304 |
Spin
Etcher, 300mm - |
1 |
300 |
| GFab003122 |
Etch |
STS |
320PC |
RIE Etch Tool |
1 |
|
| GFab003701 |
Etch |
TOKYO
ELECTRON |
TEL Unity II 85 TPA |
ETCHER |
1 |
200 |
| GFab003628 |
Etch |
TOKYO
ELECTRON |
TELUNITY ME 85TS |
ETCHER |
1 |
200 |
| GFab003572 |
Etch |
TOKYO
ELECTRON |
TELUnityII 85 TDATC |
ETCHER |
1 |
200 |
| GFab003693 |
Etch |
TOKYO
ELECTRON |
TELUnityII 85 TPATC |
ETCHER |
1 |
200 |
| GFab003590 |
Etch |
TOKYO
ELECTRON |
TELUnityIIe 85 DD |
ETCHER |
1 |
200 |
| GFab003629 |
Etch |
TOKYO
ELECTRON |
TELUnityM 85 TS |
ETCHER |
1 |
200 |
| GFab003378 |
Etch |
Tokyo Electron (TEL) |
UNITY 2 |
|
1 |
200mm |
| GFab003379 |
Etch |
Tokyo Electron (TEL) |
UNITY 2 |
|
1 |
200mm |
| GFab003227 |
Etch |
Tokyo Electron (TEL) |
Unity II DRM 85DD |
|
1 |
200mm |
| GFab003134 |
Etch |
TRION |
Minilock |
Single Wafer RIE Etcher with
Loadlock, 200mm Wafers |
1 |
200 |
| GFab003567 |
Etch |
Varian |
Varian ( Kestrel 750) |
Implanter |
1 |
200 |
| GFab003653 |
Etch |
Varian |
VARIANE500HP |
MID-IMPLANTER |
1 |
200 |
| GFab004038 |
Etch |
Lam Research |
4428 |
Rainbow 4428 Plasma Etcher |
1 |
200 |
|