Etch Equipment

GFAB Ref Category OEM Model Tool/Description Qty Wafer size
GFab003433 Etch ALCATEL / ADIXEN AMS 200 SE_I-SPEEDER Poly 1
GFab003637 Etch Applied Materials  DPS2 ETCHER 1 200
GFab003651 Etch Applied Materials  DPS2 ETCHER 1 200
GFab003672 Etch Applied Materials DPS ETCHER 1 200
GFab003687 Etch Applied Materials DPS ETCHER 1 200
GFab003603 Etch Applied Materials IPS ETCHER 1 200
GFab003627 Etch Applied Materials IPS ETCHER 1 200
GFab003566 Etch Applied Materials P-5000 ETCHER 1 200
GFab003584 Etch Applied Materials P-5000 ETCHER 1 200
GFab003611 Etch Applied Materials P-5000 ETCHER 1 200
GFab003697 Etch Applied Materials P-5000 ETCHER 1 200
GFab003168 Etch Applied Materials Centura 5200 DPS Poly, Ph II VME, Ph II Controller, HP+ Robot, Wide Body L/Ls, Wafer Mapping, 200mm SNNF, HR-DTCU, 1 200mm
GFab003436 Etch APPLIED MATERIALS CENTURA DPS R1 METAL ETCH Metal 1
GFab003438 Etch APPLIED MATERIALS CENTURA HART TRENCH ETCH Poly 1
GFab003320 Etch Axcelis TECH ES3 1 200mm
GFab003445 Etch AXCELIS FUSION 200ACU 1
GFab003446 Etch AXCELIS FUSION GEMINI GPS 1
GFab003324 Etch DNS FC-3000 1 200mm
GFab003325 Etch DNS FC-3000 1 200mm
GFab003058 Etch DRYTEK 384T Plasma Metal Etcher, 4ea Available 1
GFab003187 Etch Gasonics Aura 3000 1 200mm
GFab003186 Etch Gasonics Aura 3010 1 200mm
GFab003556 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003558 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003559 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003562 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003580 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003581 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003587 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003666 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003682 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003685 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003686 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003699 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003703 Etch GASONICS Gasonics ( Aura 3010) ASHER 1 200
GFab003452 Etch GASONICS L3510 1
GFab003453 Etch GASONICS L3510 1
GFab003328 Etch Hitachi HI TECH M712E 1 200mm
GFab003621 Etch Hitachi HITACHIM511 ETCHER 1 200
GFab003622 Etch Hitachi HITACHIM511 ETCHER 1 200
GFab003356 Etch Lam Research 4428 1 200mm
GFab003357 Etch Lam Research 4428 1 200mm
GFab003358 Etch Lam Research 4528 1 200mm
GFab003359 Etch Lam Research 4728 1 200mm
GFab003360 Etch Lam Research 4728 1 200mm
GFab003195 Etch LAM Research 4400 Rainbow 1 200mm
GFab003194 Etch LAM Research Alliance (A4) 1 200mm
GFab003698 Etch Lam Research LAMTCP9400 ETCHER 1 200
GFab003082 Etch LAM RESEARCH Rainbow 4400 Plasma Poly/Nitride Etcher, Clamping Chuck, Classic Software, 200mm Wafers 1
GFab003083 Etch LAM RESEARCH Rainbow 4520 Plasma Oxide Etcher, ESC, Envision Software, 200mm Wafers 1 200
GFab003196 Etch LAM Research TCP 9600 1 200mm
GFab003197 Etch LAM Research TCP 9600SE 1 200mm
GFab003084 Etch LAM RESEARCH TCP-9400SE Plasma Poly/Nitride Etcher, ESC, Envision Software, 200mm Wafers 1
GFab003085 Etch LAM RESEARCH TCP-9600SE Plasma Metal Etcher, ESC, Envision Software, Astex Microwave Generator, 150mm Wafers 1
GFab003480 Etch LAM RESEARCH 2300 POLY ETCH Poly 1
GFab003481 Etch LAM RESEARCH ALLIANCE 4520 Oxide 1
GFab003667 Etch LAM RESEARCH LAMEXELAN ETCHER 1 200
GFab003570 Etch LAM RESEARCH LAMR4420 ETCHER 1 200
GFab003608 Etch LAM RESEARCH LAMR4420 ETCH SYSTEM 1 200
GFab003550 Etch LAM RESEARCH LAMTCP9400 ETCHER 1 200
GFab003482 Etch LAM RESEARCH RAINBOW 4520 OXIDE Oxide 1
GFab003483 Etch LAM RESEARCH RAINBOW 4520 OXIDE Oxide 1
GFab003484 Etch LAM RESEARCH RAINBOW 4520 OXIDE Oxide 1
GFab003485 Etch LAM RESEARCH STAND-ALONE 9600 METAL ETCH Metal 1
GFab003486 Etch LAM RESEARCH STAND-ALONE 9600SE METAL ETCH Metal 1
GFab003487 Etch LAM RESEARCH STAND-ALONE 9600SE METAL ETCH Metal 1
GFab003488 Etch MATTSON ASPEN III ICP Stripper/Asher 1
GFab003294 Etch Novellus AURA 2000 1 200mm
GFab003103 Etch OXFORD INSTRUMENTS Plasmalab µP Dual RIE System, Dual 12" (i.d.) Chambers, Turbo Pumped 1
GFab003104 Etch PERKIN-ELMER 2400-8J RF Sputtering System, 3ea 200mm Targets, RF Etch, RF Bias 1
GFab003106 Etch PLASMA-THERM Waf'r Batch 74 RIE/Parallel Plasma Etcher 1
GFab003039 Etch SEZ 304 Spin Etcher, 300mm 1 300
GFab003121 Etch SEZ 304 Spin Etcher, 300mm - 1 300
GFab003122 Etch STS 320PC RIE Etch Tool 1
GFab003701 Etch TOKYO ELECTRON TEL Unity II 85 TPA ETCHER 1 200
GFab003628 Etch TOKYO ELECTRON TELUNITY ME 85TS ETCHER 1 200
GFab003572 Etch TOKYO ELECTRON TELUnityII 85 TDATC ETCHER 1 200
GFab003693 Etch TOKYO ELECTRON TELUnityII 85 TPATC ETCHER 1 200
GFab003590 Etch TOKYO ELECTRON TELUnityIIe 85 DD ETCHER 1 200
GFab003629 Etch TOKYO ELECTRON TELUnityM 85 TS ETCHER 1 200
GFab003378 Etch Tokyo Electron (TEL) UNITY 2 1 200mm
GFab003379 Etch Tokyo Electron (TEL) UNITY 2 1 200mm
GFab003227 Etch Tokyo Electron (TEL) Unity II DRM 85DD 1 200mm
GFab003134 Etch TRION Minilock Single Wafer RIE Etcher with Loadlock, 200mm Wafers 1 200
GFab003567 Etch Varian Varian ( Kestrel 750) Implanter 1 200
GFab003653 Etch Varian VARIANE500HP MID-IMPLANTER 1 200
GFab004038 Etch Lam Research 4428 Rainbow 4428 Plasma Etcher 1 200
PH: Colorado 719-229-6066
California 805-215-9188
California 408-416-3877
France +33-442 289 794