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|
Implant Equipment
| GFAB Ref |
Category |
OEM |
Model |
Tool/Description |
Qty |
Wafer size |
| GFab003585 |
Implant |
Varian |
Varian ( Vista80) |
Implanter |
1 |
200 |
| GFab003173 |
Implant |
Applied Materials |
9200 |
|
1 |
150mm |
| GFab003174 |
Implant |
Applied Materials |
PI 9500 |
AsH4, PH3, BF3, GeF4, 17 wafer
wheel, Fast wheel Index, Tilt/Angle = 0/7, Plasma Flood, Serpentine Belt |
1 |
200mm |
| GFab003158 |
Implant |
Applied Materials |
PI 9500 |
|
1 |
200mm |
| GFab003279 |
Implant |
Applied Materials |
QUANTM LEAP III |
|
1 |
200mm |
| GFab003311 |
Implant |
Applied Materials |
QUANTM
LEAP III |
|
1 |
200mm |
| GFab003316 |
Implant |
Applied Materials |
XR80 |
|
1 |
200mm |
| GFab003435 |
Implant |
APPLIED
MATERIALS |
9500XR |
HIGH CURRENT IMPLANT |
1 |
|
| GFab003044 |
Implant |
AXCELIS |
GSD Ultra 7 |
High Current Ion Implanter,
300mm Wafers |
1 |
300 |
| GFab003552 |
Implant |
AXCELIS |
Axcelis ( GSD Ultra ) |
Implanter |
1 |
200 |
| GFab003551 |
Implant |
AXCELIS |
AXCELISULTRA 7.0 |
LOW ENERGY IMPLANTER |
1 |
200 |
| GFab003384 |
Implant |
Ultratech |
MLA |
|
1 |
200mm |
| GFab003385 |
Implant |
Varian |
350DE |
|
1 |
200mm |
| GFab003386 |
Implant |
Varian |
E1000 |
|
1 |
200mm |
| GFab003387 |
Implant |
Varian |
E1000 |
|
1 |
200mm |
| GFab003388 |
Implant |
Varian |
E500 |
|
1 |
200mm |
| GFab003259 |
Implant |
Varian |
E-500 |
|
1 |
200mm |
| GFab003258 |
Implant |
Varian |
G-1520 Kestrel |
|
1 |
200mm |
| GFab003721 |
Implant |
Varian |
KESTREL 650 |
|
1 |
200mm |
| GFab003720 |
Implant |
Varian |
KESTREL 750 |
|
1 |
200mm |
| GFab003389 |
Implant |
Varian |
KESTREL 750 |
|
1 |
200mm |
| GFab003257 |
Implant |
Varian |
VIIsta-80 |
|
1 |
200mm |
|
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