| GFAB Ref |
Category |
OEM |
Model |
Tool/Description |
Qty |
Wafer size |
| GFab003176 |
Wet |
DNS |
AS-2000 |
|
1 |
200mm |
| GFab003177 |
Wet |
DNS |
AS-2000 |
|
1 |
200mm |
| GFab003178 |
Wet |
DNS |
AS-2000 |
|
1 |
200mm |
| GFab003179 |
Wet |
DNS |
AS-2000 |
|
1 |
200mm |
| GFab003673 |
Wet |
DNS |
DNS WS820C |
SC1 CLN |
1 |
200 |
| GFab003695 |
Wet |
DNS |
DNS WS820C |
ADD SC1 |
1 |
200 |
| GFab003671 |
Wet |
DNS |
DNSWS820C |
RESIST STRIP HOOD |
1 |
200 |
| GFab003677 |
Wet |
DNS |
DNSWS820C |
SC1 CLN |
1 |
200 |
| GFab003681 |
Wet |
DNS |
DNSWS820C |
SC1 CLN |
1 |
200 |
| GFab003030 |
Wet |
DNS |
SSW-629B |
Wafer Scrubber |
1 |
|
| GFab003056 |
Wet |
DNS |
SSW-629B |
Wafer Scrubber |
1 |
|
| GFab003057 |
Wet |
DNS |
WS-820C |
Automated Wet Processing System
with IPA Vapor Dryer, 200mm Wafers |
1 |
|
| GFab003418 |
Wet |
Fluoroware |
HTC-8010 |
Box Washer |
1 |
|
| GFab003059 |
Wet |
FSI |
8221 |
Spin Rinse Dryer |
1 |
|
| GFab003395 |
Wet |
FSI |
Antaries |
Wet Process
Equipment - Other in Wet Processing |
1 |
|
| GFab003396 |
Wet |
FSI |
Aries |
Wet Process
Equipment - Other in Wet Processing |
1 |
|
| GFab003102 |
Wet |
ONTRAK |
DSS-200 Series 2 Integra |
Double Sided Wafer Scrubber,
200mm Wafers |
1 |
|
| GFab003205 |
Wet |
OnTrak |
DSS-200-Series 1 |
Scrubber |
1 |
200mm |
| GFab003206 |
Wet |
OnTrak |
DSS-200-Series 1 |
Scrubber |
1 |
200mm |
| GFab003525 |
Wet |
S&K |
28IFEL |
IPA Dryer |
1 |
200 |
| GFab003208 |
Wet |
Semitool |
880S |
|
1 |
200mm |
| GFab003209 |
Wet |
Semitool |
880-S |
|
1 |
200mm |
| GFab003210 |
Wet |
Semitool |
LT-206M |
|
1 |
200mm |
| GFab003213 |
Wet |
Semitool |
Magnum |
|
1 |
200mm |
| GFab003589 |
Wet |
Semitool |
SEMITOOL |
CASSETTE CLN |
1 |
200 |
| GFab003038 |
Wet |
SEMITOOL |
SRD-4300S-5-1-E |
Spin Rinse Dryer, 200mm |
1 |
200 |
| GFab003117 |
Wet |
SEMITOOL |
SRD-4300S-5-1-E |
Spin Rinse Dryer, 200mm |
1 |
200 |
| GFab003118 |
Wet |
SEMITOOL |
ST860F |
Spin Rinser Dryer with PSC-101
Controllers |
1 |
|
| GFab003119 |
Wet |
SEMITOOL |
ST870D |
Double Stack Spin Rinser Dryer
with PCM 328 Controllers |
1 |
|
| GFab003212 |
Wet |
Semitool |
Storm II |
|
1 |
200mm |
| GFab003211 |
Wet |
Semitool |
WST-3081-AC |
|
1 |
200mm |
| GFab003120 |
Wet |
SEZ |
223 |
Dual Chamber Wafer Spin Processor
for 200mm Wafers |
1 |
200 |
| GFab003579 |
Wet |
TOKYO
ELECTRON |
TEL UW200Z |
MRCA CLN |
1 |
200 |
| GFab003634 |
Wet |
TOKYO
ELECTRON |
TEL UW200Z |
PIRANHA |
1 |
200 |
| GFab003700 |
Wet |
TOKYO
ELECTRON |
TEL UW200Z |
WAPM |
1 |
200 |
| GFab003689 |
Wet |
TOKYO
ELECTRON |
TELUW200Z |
WAPM CLN |
1 |
200 |
| GFab003142 |
Wet |
VERTEQ |
STQD-600-51L |
Megasonic Cleaner with Sunburst
Turbo Megasonic/QDR Combination Tank |
1 |
|
| GFab003143 |
Wet |
VERTEQ |
VcS-PPC-SAH |
Semi-Automatic Wet Process
System |
1 |
|