GFab has the following Spare Parts and Subassemblies available for sale:

LOC Part # MFG. PART NUMBER Description N/U/R
1 0040-52662    RE-FURB UPPER CHAMBER  REFURB
2 0021-01421    RE-FURB UPPER CHAMBER A-COAT M-DPS REFURB
3 0200-02468   Liner Chamber Upper NEW
4 0190-01195  GW2502MA-F1N000-A1 POWER SUPPLY , RF, 2,500W, 2MHZ, 2  USED
4 0190-04028  GMW25A-2DOF3NO-004 POWER SUPPLY , RF, 2,500W, 2MHZ, 2  USED
5 0242-35594   Kit Hoist Dome Lift, DPS w/ DTCU NEW
5 0020-35708   "" Include in kit above NEW
5 0021-35711   "" Inculde in Kit above NEW
6 0242-35594   Kit Hoist Dome Lift, DPS w/ DTCU NEW
6 0020-35708   "" Include in kit above NEW
6 0021-35711   "" Inculde in Kit above NEW
7 0242-35594   Kit Hoist Dome Lift, DPS w/ DTCU NEW
7 0020-35708   "" Include in kit above NEW
7 0021-35711   "" Inculde in Kit above NEW
8 0010-02497 EX-1 IPS BIAS MATCH Astex (MKS) EX1 NEW
9 0200-89033    Shaft Susceptor Support w/ pins ZNNN NEW
10 0200-89015   Shaft Wafer Lift 9.0 BC NEW
11 0190-35798 TK2D-16TC ZNEN: 16 CHANNEL TEMPERATURE CONTROLLER Blue Point Controls, Inc REFURB
12 5090-01009   Cooling Fluid Heat Transfer 135 Boil Point HT NEW
13 5090-01009   Cooling Fluid Heat Transfer 135 Boil Point HT NEW
14 3620-01124  
TMP2003
 Turbo Molecular Pump Shimadzu     Refurb           TMP2003-LM3
15 3620-01124

TG2003M

Magnetic Suspended Compound Molecular Pump (OSAKA VACCUM)


 Refurb
16 0201-35981 BSR-111700 12.22 ID Quartz Isolator w/seals 12.22ID SPE Ring TFE/VT NEW
17 3620-01593  262-81459-02 Shimadzu EI-2003M  PUMP TURBO Controller PO35 208V 50/60HZ USED
18 0240-40601   MCC to Legacy retrofit kit ETCH 5200 Controller NEW
18 0100-35049   ASY PCB SYS RESET / INTLK SEL  NEW





18 0150-76061   Cable Assy. Centura Serial Interconnect NEW
18 0010-20095   Assy. 3.5 Micro Floppy 1.4 MB NEW
18 0010-13025   Assy. PCB Video/Serial Dist. Brd. NEW
18 0190-75084   VGA Video Controller, Modified NEW
18 0010-75224   Assy, Hard Disk Drive 2.1 GB NEW
18 0020-33166   Gasket NEW
18 0150-35140   Cable Assy, Hard Disk Power NEW
18 0150-35141   Cable Assy, Floppy Disk Power NEW
18 0150-76099   Cable Assy, SCSI Interface Centura NEW
18 0150-76062   Cable Assy, SCSI Interconnect Centura NEW
18 0190-35893   CD-ROM, DE/SETCH M/F Online Tech Manuals, Win 95/NT  NEW
18 0190-36630   CD-ROM, Centura ETCH Legacy SW REL Notes, Win 95/NT NEW
19 1140-01205 TC440-C Osaka Vaccume PS Controller 
USED
20 NPN 3155031-004B Advanced Energy Automatch, 13.56Mhz (AZX-90) USED
20 0010-02497 EX-1 IPS BIAS MATCH Astex (MKS) EX1 USED
20 0190-35631   IPS Bias Cable to Chamber USED
21 3620-01593  262-81459-02 Shimadzu EI-2003M  PUMP TURBO Controller PO35 208V 50/60HZ USED
21 NPN 305W-A Ebara Turbo Molecular Pump Controller  305W-A USED
22 0920-00027 3155156-001 Advanced Energy Navigator Match 5513-L80Z USED
23 0190-01291 ABX-X494 Astex Filter Board ABX-X494 NEW
24 0190-36684 80-P01-HP ETO IPS 80-S10 IPS Electrostatic Power Supply  E-chuck USED
25 0190-18154 ABX-X302 ETO HV Diode Board    *** NEEDS REPAIR*** USED
26 0190-18138   No pic. ABX-X272 ETO RF Gen PS Control Bd Ultima NEW
27 0010-37918   Assy PCB Encl. Source Sig Cond USED
28 0190-36680 ARX-X258-SP ETO 2.0 Mhz Wattmeter ARX-X258 SP USED
29 0150-10648   Source Signal Conditioning Board Cable K-Tec Electronics USED
30 0190-36681 ARX-X268 ETO  1.7 Mhz Wattmeter  USED
31 0242-35595   KIT,BEAM & POWER SUPPLY,DOME LIFT,DPS CE NEW
31 0010-36474A   Western Precision Inc. Power Supply NEW
31 0040-20445   WPI Post Long Frame Support NEW
31 0021-35709   WPI Hardware NEW
31 0021-35710   WPI Hardware NEW
31 0010-36525   Assy, Select Control NEW
31 0090-20129   Power Cable NEW
31 0150-36050   Low voltage Cable NEW
31 0242-35595H   Various Hardware NEW
32 0201-12801   Set Kit 2 boxes See inventory, NEW
33 0200-02696   Single Quartz Ring 200mm SNNF  NEW
34 0190-36680 ARX-X258-SP ETO 2.0 Mhz Wattmeter ARX-X258 SP USED
35 0190-18136 ABX-X284 ETO RF Gen HV Cap Bank Ultima USED
36 NPN APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
37 0190-A0005    ZNNN: SPINDEL VACUUM CHANNEL +1/4  REFURB
37 NPN TBVG00-S03 Norcal Throttling Butterfly Valve USED
37   TBVG00-S02 Norcal Throttling Butterfly Valve USED
37   TBVG00-S02 Norcal Throttling Butterfly Valve USED
37   TBVG00-S02 Norcal Throttling Butterfly Valve USED
37   H213A-020 Headland flow meter with hoses USED
37   0140-LL110 Cables NEW
37   0140-LL108 Cables NEW
37   0140-LL106 Cables NEW
38 0920-00024 3150852-001 Advanced Energy VH2060 Source Generator Producer Etch USED
39 0200-02696   Single Quartz Ring 200mm SNNF  NEW
40 0200-02848      Single Ceramic Ring NEW
41 3620-01593 262-81459-02 Shimadzu EI-2003M  PUMP TURBO Controller PO35 208V 50/60HZ USED
42 3620-01593 262-81459-02 Shimadzu EI-2003M1  PUMP TURBO Controller PO35 208V 50/60HZ USED
43 3620-01593 262-81459-02 Shimadzu EI-2003M1  PUMP TURBO Controller PO35 208V 50/60HZ USED
44 NPN A3L3L000CA140D111A Advanced Energy 13.56 Mhz, APEX 1513 Rev G USED
45 0190-36308  GMW25A-2D0FNO-003 RF GEN .2500W 1.8-2.2MHZ 200/208VA  USED
46 0190-A0005    SPINDEL VACUUM CHANNEL +1/4  USED
47 0240-76710   Kit, IHC perchamber, Centura Metal Etch NEW
47 0010-40240   IHC Assembly, 400 Torr/50SCCM NEW
47 3700-01288   USE 3320-01165 GSK VCR 1/4 NEW
47 3690-04088   SCR Cap SKT HD 10-32 X1 /2L HEX SKT SST W/LW NEW
47 0150-75213   Cable Assy, MFC Adapter with EMI filter D NEW
48 0242-07143   Kit Retrofit, Pirani / ATM Switch Assy. NEW
48 0190-36521   Pirani / ATM switch Assy. NEW
48 3320-01024   Use 3320-01165 GSKT VCR 1/4 NEW
48 0250-01187   Pirani /ATM Switch Assy procedure USED
49 0920-00024 3150852-001 Advanced Energy VH2060 Source Generator Producer Etch USED
50 0190-02949 ARX-X242 ASTEX 4KW BIAS SOURCE DECK ARX-X242 REFURB
51 NPN   Various Parts in Grey tote  
51 0140-01541   Cable Assy. NEW
51 0200-36665   Window Quartz .50 Thk Produce 200MM NEW
51 0040-32118   Metal panel NEW
51 0100-09307   AMAT Relay DTLR Interlock NEW
51 0060-76188   Warning Labels NEW
51 0040-38662   ID# 12939900 NEW
51 3370-01171   Handles NEW
51 0150-10409   Power Cables NEW
51 0150-39233   Power Cable Remote A/C NEW
51 0021-03740   Plate NEW
51 0040-03062   Cover VME System Controller NEW
51 0021-03741   Quartz Guide Lid Producer NEW
51 0021-08869   VME Panel NEW
51 0021-08343   Front AC skin NEW
51 0040-01496   Front Panel NEW
51 0040-32063   UNKNOWN NEW
51 3300-05312   FTG Tube NEW
51 0720-05029   Connector Comm Adapter NEW
51 0680-01215   CB/EMO NEW
52 NPN CSD5814N-T VEXTA 5-PHASE DRIVER 24V +/-10% 2.1A USED
53 NPN 110C Luxtron Model 100C optical Fiber Temperture Control System USED
53 0190-36109 P1195 Phase Detector 208V USED
53 0190-36109 P1195 Phase Detector 208V USED
54 0021-06757   Electronic Enclosure Cover TiC L4 TiN NEW
55 4217-03511   440 ft 3/8" Hose NEW
56 1110-01063 3155086 Dome NETWORK RF SOURCE MATCH 13.56MHZ AZX-90 New
57 0190-00321    IPS AC FACILITY BOX,CH B/D  NEW
58 0920-00027 3155156-001 Advanced Energy Navigator Box # 0190-15207 USED
59 0920-01111 F120162-2 Astex GEN   MICROWAVE MAGNETRON HEAD 2.45GHZ 3 NEW
60 3620-01593 262-81459-02 Shimadzu EI-2003M1  PUMP TURBO Controller PO35 208V 50/60HZ USED
61 3620-01593 262-81459-02 Shimadzu EI-2003M1  PUMP TURBO Controller PO35 208V 50/60HZ No box USED
62 0010-00878 982 005 SPRING COIL ASSY, SOURCE, DTCU, DPS USED
63 0010-00878 33894031 SPRING COIL ASSY, SOURCE, DTCU, DPS USED
64 0190-04193 VAT 216612/02/14 ETCH BOX 22 DPS slit Valve Insert New
65 3620-01218 A951100080

Leybold Turbo Vacuum 340MCT 110V 60Hz 8W


 Refurb
66 0010-37165 98-037 SPRING COIL ASSY, SOURCE, DTCU, DPS Cracked USED
66 0010-37165 98-037 SPRING COIL ASSY, SOURCE, DTCU, DPS Burnt USED
67 0240-11630   KIT, 200MM MIRRA/MESA RETROFIT PHASE A"  NEW
67 0240-07773   Kit, Retrofit, Linear Slide, I NEW
67 0240-10412   200MM Walking Beam Peek Finger NEW
67 0240-12040   Kit W/Metric HDWR Upgrade Grip NEW
67 0240-05184   Kit, MESA, Input Shuttle, 200W NEW
67 0240-07774   Kit, Retrofit, Housing, Input NEW
67 0010-04400   Assy, Shuttle Holder Flat, INP NEW
67 0240-12425   Kit, Retrofit 200MM HCLU RELIA NEW
68 0190-01195 GMW25A-2D0F3N0-004 Genesis RF Generator, 2,500W, 50-60HZ USED
69 3348-37599 A3L3L000CA140D111A Apex Generator W/ Unopened Manual and opened parts New
70 0920-00003 A3L3L000BA14D111A GEN   RF 13.56MHZ 3000W 208V SOURCE AE APEX USED
71 0190-36308  GMW25A-2D0FNO-004 RF GEN .2500W 1.8-2.2MHZ 200/208VA  REFURB
72 1140-01205 TC440-C Osaka Vaccume PS Controller USED
73 NPN INR-498-012B Thermo Chiller HX-2000 SMC Corporation 200-208 3 phase 3 wire + Grd. NEW
74 0242-14987 INR-244-602A Sub floor Mount for INR-244-602A NEW
75 0242-14987 INR-244-602A Chiller Parts NEW
75 3380-00010   HE Thermo Electric 220 Volt NEW
75 0190-03435   Hose Assy. NEW
75 0010-37128   Box D89 Tri port NEW
75 5090-01009   Cool Fluid Heat Transfer NEW
75 0620-02482   Cable Assy RS-232 25ft. NEW
75 0050-54791   Teflon Hose Assy. NEW
76 0242-14987 INR-244-602A Thermo Con SMC Chiller NEW

0221-31115        0010-37264   Multi Set Cool Down  USED
KR 0200-00458   Ceramic Robot Blade  
KR 2200-11311   DPS II Focus Ring Quartz 1/4  
KR 0200-02848   Single Ring Ceramic  
KR 0242-35595   Kit Beam Power Supply dome Lift  
KR 0200-02356   Single Ring Quartz, DPS Centura, SNNF .50 HT  
KR 0020-19139   Pumping Plate 200mm ALD TiN  
KR 2200-11312   DPS II Quartz 1/4 Single Ring  
KR 0200-01947   Susceptor  
KR 0190-15207   AE Navigator Match - Certified operational by AE  
KR 0040-38663      
KR NPN   Osaka Vacuum Power Supply TC-440-C  
KR 2109-17533   DPS II Inficon 100MT Manometer  
KR 0040-47442   Manifold W-Seal ECV 200mm  
KR 0010-00878   RF Coil DPS  USED
KR 0010-05475   Chuck  
KR NPN   DPS VAT AP MF Slit Valve Actuator  
KR 0010-01927   200mm SNNF BESC Bias Electrode Chuck NEW
KR 0190-09468   Seriplex Sensor Bus APC SPS Mux ADIO-10 NEW
KR 3700-02800   O-Ring ID 51.700 CSD I.D.X. 210 Viton, Producer NEW
KR NPN   5 Phase driver Model C505814 N-T No 3788 TR8 Oriental Motor Corr NEW
KR 3700-02550   O-Ring ABS 354 Nitrice NEW
KR 3030-08075   MFC 7340 5 SLM NF3 1/4 VCR MTL  NEW
KR 0630-01395   Draloric PE 100 14 kVp 600pf +/-5% R85 M3 New
KR NPN   QOB 330 5237 0037 Square D 10 kVa Breakers NEW
KR 0200-89032   Tip Shaft Susceptor, E2 Chamber NEW
KR 0720-00545   Pin Male NEW
KR 0200-01559   Baffle Inj LTV, high outer flow NEW
KR 0010-A0092/96174   APD Box 3mm Assy NEW
KR 0910-01178   Buss Fuses NEW
KR 0910-01180   Buss Fuses NEW
KR 0910-01179   Buss Fuses NEW
KR 0910-01164   Buss Fuses NEW
KR 0910-01136   Buss Fuses NEW
KR 0910-01133   Buss Fuses NEW
KR 0910-01163   Buss Fuses NEW
KR 0910-01166   Buss Fuses NEW
KR 0621-10733 P2     NEW
KR 0021-37657   Rev P1 NEW
KR 3030-04229 252201176 STEC SEC 4400 MC N20 2SLPM  NEW
KR 3690-04012     NEW
KR NPN   10K 001 4409221 FNT-1226 NEW
KR NPN   Roll Kaptan S-52 Pres Sensitive 2 mil 600degF service NEW
KR NPN   PermaLok Wicking Adhedsive Sealant NEW
KR 3030-04879   SNSR flow Insertion  NEW
KR 0090-A0004/96174   Vac Relay On/Off NEW
KR 3300-05237     NEW
KR 0900-01063   Filter Bandpass, UV387NM Ctr… NEW
KR 0020-19882   Tube Lift 200mm NEW
KR 0010-05745   Bias Match NEW


Part # REV Description
0010-01152
0010-01152
0010-01152
0010-01152
0010-01152
0010-01152
0010-04637 1 PIN CERAMIC W/O-RING LOADLOCK
0010-04637 1 PIN CERAMIC W/O-RING LOADLOCK
0010-04637 1 PIN CERAMIC W/O-RING LOADLOCK
0010-04638 1
0010-04638 1
0010-04639 1 ASSY,BRKT LEFT SAFETY BOLT
0010-07332 2 LLB 200MM LIFT HOOP CENT
0010-07332 2 LLB 200MM LIFT HOOP CENT
0010-09652 A HOSE ASSY, LAMP MODULE 500J
0010-09652
0010-09652
0010-09652
0010-09652
0010-09978 C ASSY. LAMP MODULE
0010-09978 C ASSY. LAMP MODULE
0010-09979
0010-09979
0010-13954 K
0010-13954 K
0010-13954K
0010-13954K
0010-20138 ASSY TC AMP HSNG
0010-20317
0010-20317
0010-20917
0010-20917
0010-21409 ASSY THERMAL SWITCH PVD CHAMBER
0010-222XXK
0010-222XXK
0010-22744 4 PVD LOWER CHAMBER
0010-22744 4 PVD LOWER CHAMBER
0010-22XXK
0010-22XXK
0010-3608 B LAMP MODULE CENTURA 200MM
0010-3608 B LAMP MODULE CENTURA 200MM
0010-70812 2
0010-70812 2
0010-76165 A
0010-76165 A
0010-76188 1
0010-76188 1
0010-9327XK
0010-9327XK
0015-01665
0015-01665
0015-09021 B DOWEL PIN
0015-09069 D SOC.HD.SCREW.MOD
0015-09078 C PULLEY, MOTOR, MOD THROTTLE DR
0015-09092
0015-09092
0015-09222 A COOLING PLATE ACTUATOR
0015-20002 C
0015-20002 C
0015-20037 B PULLEY MODIFIED 70 6R
0015-20037
0015-20037
0015-20037
0015-20037
0015-20037
0015-20037
0015-20113 SPROCKET MOD 15 TEETH
0015-20114
0015-20114
0015-35012 B MODIFICATION, RING ALIGN, SCREW
0015-35038 A PLUG T/CPORT 9/16-18UNF
0015-35281 P3 BRACKET OTF AMPLIFIER
0015-76015 B
0015-76015 B
0015-76016 B
0015-76016 B
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0020-01112 1 PLATE, RF INTERLOCK SWITCH, 300MM HDPCVD
0020-01190 C wHANDLE, ALUMINUM
0020-01665 1 FLAG, LOWER SENSOR, LIFT 300MM, HDPCVD
0020-01919 2 COVER CAPACITOR PROTECTIVE
0020-02173 SPACER SWLL HANDLE
0020-02381 2 BRACKET LIFT REGULATOR 300MM HDP-CVD, UL
0020-02510 COVER, PCB GAS BOX 300MM
0020-02510 5 COVER, PCB GAS BOX 300MM
0020-02510
0020-02510
0020-02535 2 NO MATCHES
0020-02590 3
0020-02590 3
0020-04148
0020-04148
0020-04150 A BUSHING, WATER BOX
0020-04278 P1
0020-04278 P1
0020-05749 PB
0020-05749 PBR ADAPTER W/B LOADLOCK ENDURA
0020-05749 PB
0020-05749 PBR ADAPTER W/B LOADLOCK ENDURA
0020-05808 A CLAMP, INSERT INSULATOR
0020-05808 A CLAMP, INSERT INSULATOR
0020-05809 A
0020-05809 A
0020-05809 A
0020-05809 A
0020-05919 2 STRUT,UPPER FI INTERFACE,300MM CENTURA M
0020-05992 A
0020-05992 A
0020-05992 A
0020-05992 A
0020-06754 E
0020-06754 E
0020-07045 P1 NO MATCHES
0020-07046 P1 BRACKET, STOP, 300MM LIFT ASSY, HDPCVD
0020-07070 P1 NO MATCHES
0020-07363 P1 COVER, SLIT VALVE, CH. TOP, 300MM, HDPCV
0020-08205 5
0020-08205 5
0020-08432 1
0020-08432
0020-08432
0020-08432
0020-08432
0020-08432 1
0020-08432 1
0020-08432
0020-08432
0020-08432
0020-08432
0020-08432 1
0020-08510
0020-08510
0020-08935 2